2/18/2011	9:59:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	9:59:48 AM	Recipe started at 9:59 AM
2/18/2011	9:59:48 AM	H2 valve closed
2/18/2011	9:59:48 AM	BCl3 valve closed
2/18/2011	9:59:48 AM	PH3 valve closed
2/18/2011	9:59:48 AM	SiCl4 pre valve closed
2/18/2011	9:59:48 AM	SiCl4 post valve closed
2/18/2011	9:59:48 AM	Main Vac valve closed
2/18/2011	9:59:48 AM	Bypass valve closed
2/18/2011	9:59:48 AM	Bubbler valve closed
2/18/2011	9:59:48 AM	Helium valve opened
2/18/2011	9:59:48 AM	Helium MFC set to  500.000000
2/18/2011	9:59:48 AM	H2 MFC set to  0.000000
2/18/2011	9:59:48 AM	BCl3 MFC set to  0.000000
2/18/2011	9:59:48 AM	PHl3 MFC set to  0.000000
2/18/2011	9:59:48 AM	SiCl4 MFC set to  0.000000
2/18/2011	9:59:48 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	9:59:48 AM	Tube furnace set to 0
2/18/2011	10:01:09 AM	Helium valve closed
2/18/2011	10:01:09 AM	H2 valve closed
2/18/2011	10:01:09 AM	BCl3 valve closed
2/18/2011	10:01:09 AM	PH3 valve closed
2/18/2011	10:01:09 AM	SiCl4 pre valve closed
2/18/2011	10:01:09 AM	SiCl4 post valve closed
2/18/2011	10:01:09 AM	Main Vac valve closed
2/18/2011	10:01:09 AM	Bypass valve closed
2/18/2011	10:01:09 AM	Bubbler valve closed
2/18/2011	10:01:09 AM	Helium MFC set to  0.000000
2/18/2011	10:01:09 AM	H2 MFC set to  0.000000
2/18/2011	10:01:09 AM	BCl3 MFC set to  0.000000
2/18/2011	10:01:09 AM	PHl3 MFC set to  0.000000
2/18/2011	10:01:09 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:01:09 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:01:09 AM	Tube furnace set to 0
2/18/2011	10:01:09 AM	Run finished at 10:01 AM
2/18/2011	10:01:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	10:10:36 AM	Recipe started at 10:10 AM
2/18/2011	10:10:36 AM	Helium valve closed
2/18/2011	10:10:36 AM	H2 valve closed
2/18/2011	10:10:36 AM	BCl3 valve closed
2/18/2011	10:10:36 AM	PH3 valve closed
2/18/2011	10:10:36 AM	SiCl4 pre valve closed
2/18/2011	10:10:36 AM	SiCl4 post valve closed
2/18/2011	10:10:36 AM	Main Vac valve closed
2/18/2011	10:10:36 AM	Bubbler valve closed
2/18/2011	10:10:36 AM	Bypass valve opened
2/18/2011	10:10:36 AM	Helium MFC set to  0.000000
2/18/2011	10:10:36 AM	H2 MFC set to  0.000000
2/18/2011	10:10:36 AM	BCl3 MFC set to  0.000000
2/18/2011	10:10:36 AM	PHl3 MFC set to  0.000000
2/18/2011	10:10:36 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:10:36 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:10:37 AM	Tube furnace set to 0
2/18/2011	10:11:01 AM	Run aborted at 10:11 AM
2/18/2011	10:11:01 AM	Helium valve closed
2/18/2011	10:11:01 AM	H2 valve closed
2/18/2011	10:11:01 AM	BCl3 valve closed
2/18/2011	10:11:01 AM	PH3 valve closed
2/18/2011	10:11:01 AM	SiCl4 pre valve closed
2/18/2011	10:11:01 AM	SiCl4 post valve closed
2/18/2011	10:11:01 AM	Bypass valve closed
2/18/2011	10:11:01 AM	Main Vac valve closed
2/18/2011	10:11:01 AM	Bubbler valve closed
2/18/2011	10:11:01 AM	Helium MFC set to  0.000000
2/18/2011	10:11:01 AM	H2 MFC set to  0.000000
2/18/2011	10:11:01 AM	BCl3 MFC set to  0.000000
2/18/2011	10:11:01 AM	PHl3 MFC set to  0.000000
2/18/2011	10:11:01 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:11:01 AM	Tube furnace set to 0
2/18/2011	10:11:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	10:11:06 AM	Recipe started at 10:11 AM
2/18/2011	10:11:06 AM	H2 valve closed
2/18/2011	10:11:06 AM	BCl3 valve closed
2/18/2011	10:11:06 AM	PH3 valve closed
2/18/2011	10:11:06 AM	SiCl4 pre valve closed
2/18/2011	10:11:06 AM	SiCl4 post valve closed
2/18/2011	10:11:06 AM	Main Vac valve closed
2/18/2011	10:11:06 AM	Bypass valve closed
2/18/2011	10:11:06 AM	Bubbler valve closed
2/18/2011	10:11:06 AM	Helium valve opened
2/18/2011	10:11:06 AM	Helium MFC set to  500.000000
2/18/2011	10:11:06 AM	H2 MFC set to  0.000000
2/18/2011	10:11:06 AM	BCl3 MFC set to  0.000000
2/18/2011	10:11:06 AM	PHl3 MFC set to  0.000000
2/18/2011	10:11:06 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:11:06 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:11:06 AM	Tube furnace set to 0
2/18/2011	10:11:10 AM	Helium valve closed
2/18/2011	10:11:10 AM	H2 valve closed
2/18/2011	10:11:10 AM	BCl3 valve closed
2/18/2011	10:11:10 AM	PH3 valve closed
2/18/2011	10:11:10 AM	SiCl4 pre valve closed
2/18/2011	10:11:10 AM	SiCl4 post valve closed
2/18/2011	10:11:10 AM	Main Vac valve closed
2/18/2011	10:11:10 AM	Bypass valve closed
2/18/2011	10:11:10 AM	Bubbler valve closed
2/18/2011	10:11:10 AM	Helium MFC set to  0.000000
2/18/2011	10:11:10 AM	H2 MFC set to  0.000000
2/18/2011	10:11:10 AM	BCl3 MFC set to  0.000000
2/18/2011	10:11:10 AM	PHl3 MFC set to  0.000000
2/18/2011	10:11:10 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:11:10 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:11:10 AM	Tube furnace set to 0
2/18/2011	10:11:10 AM	Run finished at 10:11 AM
2/18/2011	10:11:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	10:11:58 AM	Recipe started at 10:11 AM
2/18/2011	10:11:58 AM	Helium valve closed
2/18/2011	10:11:58 AM	H2 valve closed
2/18/2011	10:11:58 AM	BCl3 valve closed
2/18/2011	10:11:58 AM	PH3 valve closed
2/18/2011	10:11:58 AM	SiCl4 pre valve closed
2/18/2011	10:11:58 AM	SiCl4 post valve closed
2/18/2011	10:11:58 AM	Main Vac valve closed
2/18/2011	10:11:58 AM	Bubbler valve closed
2/18/2011	10:11:58 AM	Bypass valve opened
2/18/2011	10:11:58 AM	Helium MFC set to  0.000000
2/18/2011	10:11:58 AM	H2 MFC set to  0.000000
2/18/2011	10:11:58 AM	BCl3 MFC set to  0.000000
2/18/2011	10:11:58 AM	PHl3 MFC set to  0.000000
2/18/2011	10:11:58 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:11:58 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:11:58 AM	Tube furnace set to 0
2/18/2011	10:12:32 AM	Helium valve closed
2/18/2011	10:12:32 AM	H2 valve closed
2/18/2011	10:12:32 AM	BCl3 valve closed
2/18/2011	10:12:32 AM	PH3 valve closed
2/18/2011	10:12:32 AM	SiCl4 pre valve closed
2/18/2011	10:12:32 AM	SiCl4 post valve closed
2/18/2011	10:12:32 AM	Bubbler valve closed
2/18/2011	10:12:32 AM	Main Vac valve opened
2/18/2011	10:12:32 AM	Bypass valve opened
2/18/2011	10:12:32 AM	Helium MFC set to  0.000000
2/18/2011	10:12:32 AM	H2 MFC set to  0.000000
2/18/2011	10:12:32 AM	BCl3 MFC set to  0.000000
2/18/2011	10:12:32 AM	PHl3 MFC set to  0.000000
2/18/2011	10:12:32 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:12:32 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:12:32 AM	Tube furnace set to 0
2/18/2011	10:12:53 AM	H2 valve closed
2/18/2011	10:12:53 AM	BCl3 valve closed
2/18/2011	10:12:53 AM	PH3 valve closed
2/18/2011	10:12:53 AM	SiCl4 pre valve closed
2/18/2011	10:12:53 AM	SiCl4 post valve closed
2/18/2011	10:12:53 AM	Bubbler valve closed
2/18/2011	10:12:53 AM	Helium valve opened
2/18/2011	10:12:53 AM	Main Vac valve opened
2/18/2011	10:12:53 AM	Bypass valve opened
2/18/2011	10:12:53 AM	Helium MFC set to  500.000000
2/18/2011	10:12:53 AM	H2 MFC set to  0.000000
2/18/2011	10:12:53 AM	BCl3 MFC set to  0.000000
2/18/2011	10:12:53 AM	PHl3 MFC set to  0.000000
2/18/2011	10:12:53 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:12:53 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:12:54 AM	Tube furnace set to 0
2/18/2011	10:15:54 AM	H2 valve closed
2/18/2011	10:15:54 AM	BCl3 valve closed
2/18/2011	10:15:54 AM	PH3 valve closed
2/18/2011	10:15:54 AM	SiCl4 pre valve closed
2/18/2011	10:15:54 AM	SiCl4 post valve closed
2/18/2011	10:15:54 AM	Main Vac valve closed
2/18/2011	10:15:54 AM	Bypass valve closed
2/18/2011	10:15:54 AM	Bubbler valve closed
2/18/2011	10:15:54 AM	Helium valve opened
2/18/2011	10:15:54 AM	Helium MFC set to  500.000000
2/18/2011	10:15:54 AM	H2 MFC set to  0.000000
2/18/2011	10:15:54 AM	BCl3 MFC set to  0.000000
2/18/2011	10:15:54 AM	PHl3 MFC set to  0.000000
2/18/2011	10:15:54 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:15:54 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:15:54 AM	Tube furnace set to 100
2/18/2011	10:17:19 AM	H2 valve closed
2/18/2011	10:17:19 AM	BCl3 valve closed
2/18/2011	10:17:19 AM	PH3 valve closed
2/18/2011	10:17:19 AM	SiCl4 pre valve closed
2/18/2011	10:17:19 AM	SiCl4 post valve closed
2/18/2011	10:17:19 AM	Main Vac valve closed
2/18/2011	10:17:19 AM	Bypass valve closed
2/18/2011	10:17:19 AM	Helium valve opened
2/18/2011	10:17:19 AM	Bubbler valve opened
2/18/2011	10:17:19 AM	Helium MFC set to  500.000000
2/18/2011	10:17:19 AM	H2 MFC set to  0.000000
2/18/2011	10:17:19 AM	BCl3 MFC set to  0.000000
2/18/2011	10:17:19 AM	PHl3 MFC set to  0.000000
2/18/2011	10:17:19 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:17:19 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:17:19 AM	Tube furnace set to 500
2/18/2011	10:24:09 AM	Helium valve closed
2/18/2011	10:24:09 AM	BCl3 valve closed
2/18/2011	10:24:09 AM	PH3 valve closed
2/18/2011	10:24:09 AM	SiCl4 pre valve closed
2/18/2011	10:24:09 AM	SiCl4 post valve closed
2/18/2011	10:24:09 AM	Main Vac valve closed
2/18/2011	10:24:09 AM	Bypass valve closed
2/18/2011	10:24:09 AM	H2 valve opened
2/18/2011	10:24:09 AM	Bubbler valve opened
2/18/2011	10:24:09 AM	Helium MFC set to  0.000000
2/18/2011	10:24:09 AM	H2 MFC set to  500.000000
2/18/2011	10:24:09 AM	BCl3 MFC set to  0.000000
2/18/2011	10:24:09 AM	PHl3 MFC set to  0.000000
2/18/2011	10:24:09 AM	SiCl4 MFC set to  0.000000
2/18/2011	10:24:09 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	10:24:09 AM	Tube furnace set to 500
2/18/2011	11:24:09 AM	H2 valve closed
2/18/2011	11:24:09 AM	BCl3 valve closed
2/18/2011	11:24:09 AM	PH3 valve closed
2/18/2011	11:24:09 AM	SiCl4 pre valve closed
2/18/2011	11:24:09 AM	SiCl4 post valve closed
2/18/2011	11:24:09 AM	Main Vac valve closed
2/18/2011	11:24:09 AM	Bypass valve closed
2/18/2011	11:24:09 AM	Helium valve opened
2/18/2011	11:24:09 AM	Bubbler valve opened
2/18/2011	11:24:09 AM	Helium MFC set to  500.000000
2/18/2011	11:24:09 AM	H2 MFC set to  0.000000
2/18/2011	11:24:09 AM	BCl3 MFC set to  0.000000
2/18/2011	11:24:09 AM	PHl3 MFC set to  0.000000
2/18/2011	11:24:09 AM	SiCl4 MFC set to  0.000000
2/18/2011	11:24:09 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	11:24:09 AM	Tube furnace set to 0
2/18/2011	11:34:05 AM	Helium valve closed
2/18/2011	11:34:05 AM	H2 valve closed
2/18/2011	11:34:05 AM	BCl3 valve closed
2/18/2011	11:34:05 AM	PH3 valve closed
2/18/2011	11:34:05 AM	SiCl4 pre valve closed
2/18/2011	11:34:05 AM	SiCl4 post valve closed
2/18/2011	11:34:05 AM	Main Vac valve closed
2/18/2011	11:34:05 AM	Bypass valve closed
2/18/2011	11:34:05 AM	Bubbler valve closed
2/18/2011	11:34:05 AM	Helium MFC set to  0.000000
2/18/2011	11:34:05 AM	H2 MFC set to  0.000000
2/18/2011	11:34:05 AM	BCl3 MFC set to  0.000000
2/18/2011	11:34:05 AM	PHl3 MFC set to  0.000000
2/18/2011	11:34:05 AM	SiCl4 MFC set to  0.000000
2/18/2011	11:34:05 AM	Bypass solenoid MFC set to  0.000000
2/18/2011	11:34:05 AM	Tube furnace set to 0
2/18/2011	11:34:05 AM	Run finished at 11:34 AM
2/18/2011	1:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	1:45:38 PM	Recipe started at 1:45 PM
2/18/2011	1:45:38 PM	H2 valve closed
2/18/2011	1:45:38 PM	BCl3 valve closed
2/18/2011	1:45:38 PM	PH3 valve closed
2/18/2011	1:45:38 PM	SiCl4 pre valve closed
2/18/2011	1:45:38 PM	SiCl4 post valve closed
2/18/2011	1:45:38 PM	Main Vac valve closed
2/18/2011	1:45:38 PM	Bypass valve closed
2/18/2011	1:45:38 PM	Bubbler valve closed
2/18/2011	1:45:38 PM	Helium valve opened
2/18/2011	1:45:38 PM	Helium MFC set to  500.000000
2/18/2011	1:45:38 PM	H2 MFC set to  0.000000
2/18/2011	1:45:38 PM	BCl3 MFC set to  0.000000
2/18/2011	1:45:38 PM	PHl3 MFC set to  0.000000
2/18/2011	1:45:38 PM	SiCl4 MFC set to  0.000000
2/18/2011	1:45:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	1:45:38 PM	Tube furnace set to 0
2/18/2011	1:45:38 PM	Helium valve closed
2/18/2011	1:45:38 PM	H2 valve closed
2/18/2011	1:45:38 PM	BCl3 valve closed
2/18/2011	1:45:38 PM	PH3 valve closed
2/18/2011	1:45:38 PM	SiCl4 pre valve closed
2/18/2011	1:45:38 PM	SiCl4 post valve closed
2/18/2011	1:45:38 PM	Main Vac valve closed
2/18/2011	1:45:38 PM	Bypass valve closed
2/18/2011	1:45:38 PM	Bubbler valve closed
2/18/2011	1:45:38 PM	Helium MFC set to  0.000000
2/18/2011	1:45:38 PM	H2 MFC set to  0.000000
2/18/2011	1:45:38 PM	BCl3 MFC set to  0.000000
2/18/2011	1:45:38 PM	PHl3 MFC set to  0.000000
2/18/2011	1:45:38 PM	SiCl4 MFC set to  0.000000
2/18/2011	1:45:38 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	1:45:38 PM	Tube furnace set to 0
2/18/2011	1:45:39 PM	Run finished at 1:45 PM
2/18/2011	1:45:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	1:54:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2011	1:54:52 PM	Recipe started at 1:54 PM
2/18/2011	1:54:52 PM	Helium valve closed
2/18/2011	1:54:52 PM	H2 valve closed
2/18/2011	1:54:52 PM	BCl3 valve closed
2/18/2011	1:54:52 PM	PH3 valve closed
2/18/2011	1:54:52 PM	SiCl4 pre valve closed
2/18/2011	1:54:52 PM	SiCl4 post valve closed
2/18/2011	1:54:52 PM	Main Vac valve closed
2/18/2011	1:54:52 PM	Bubbler valve closed
2/18/2011	1:54:52 PM	Bypass valve opened
2/18/2011	1:54:52 PM	Helium MFC set to  0.000000
2/18/2011	1:54:52 PM	H2 MFC set to  0.000000
2/18/2011	1:54:52 PM	BCl3 MFC set to  0.000000
2/18/2011	1:54:52 PM	PHl3 MFC set to  0.000000
2/18/2011	1:54:52 PM	SiCl4 MFC set to  0.000000
2/18/2011	1:54:52 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	1:54:52 PM	Tube furnace set to 0
2/18/2011	1:55:25 PM	Helium valve closed
2/18/2011	1:55:25 PM	H2 valve closed
2/18/2011	1:55:25 PM	BCl3 valve closed
2/18/2011	1:55:25 PM	PH3 valve closed
2/18/2011	1:55:25 PM	SiCl4 pre valve closed
2/18/2011	1:55:25 PM	SiCl4 post valve closed
2/18/2011	1:55:25 PM	Bubbler valve closed
2/18/2011	1:55:25 PM	Main Vac valve opened
2/18/2011	1:55:25 PM	Bypass valve opened
2/18/2011	1:55:25 PM	Helium MFC set to  0.000000
2/18/2011	1:55:25 PM	H2 MFC set to  0.000000
2/18/2011	1:55:25 PM	BCl3 MFC set to  0.000000
2/18/2011	1:55:25 PM	PHl3 MFC set to  0.000000
2/18/2011	1:55:25 PM	SiCl4 MFC set to  0.000000
2/18/2011	1:55:25 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	1:55:26 PM	Tube furnace set to 0
2/18/2011	1:55:26 PM	Run finished at 1:55 PM
2/18/2011	1:55:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2011	1:55:30 PM	Tube furnace set to 500
2/18/2011	2:26:35 PM	Helium MFC set to  100.000000
2/18/2011	2:26:36 PM	Helium valve opened
2/18/2011	2:40:31 PM	Helium valve closed
2/18/2011	2:40:33 PM	Helium MFC set to  100.000000
2/18/2011	2:40:36 PM	Helium MFC set to  0.000000
2/18/2011	2:44:30 PM	Recipe started at 2:44 PM
2/18/2011	2:44:30 PM	Helium valve closed
2/18/2011	2:44:30 PM	BCl3 valve closed
2/18/2011	2:44:30 PM	PH3 valve closed
2/18/2011	2:44:30 PM	SiCl4 pre valve closed
2/18/2011	2:44:30 PM	SiCl4 post valve closed
2/18/2011	2:44:30 PM	Main Vac valve closed
2/18/2011	2:44:30 PM	Bypass valve closed
2/18/2011	2:44:30 PM	Bubbler valve closed
2/18/2011	2:44:30 PM	H2 valve opened
2/18/2011	2:44:30 PM	Helium MFC set to  0.000000
2/18/2011	2:44:30 PM	H2 MFC set to  500.000000
2/18/2011	2:44:30 PM	BCl3 MFC set to  0.000000
2/18/2011	2:44:30 PM	PHl3 MFC set to  0.000000
2/18/2011	2:44:30 PM	SiCl4 MFC set to  0.000000
2/18/2011	2:44:30 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	2:44:30 PM	Tube furnace set to 200
2/18/2011	2:45:43 PM	Helium valve closed
2/18/2011	2:45:43 PM	BCl3 valve closed
2/18/2011	2:45:43 PM	PH3 valve closed
2/18/2011	2:45:43 PM	SiCl4 pre valve closed
2/18/2011	2:45:43 PM	SiCl4 post valve closed
2/18/2011	2:45:43 PM	Main Vac valve closed
2/18/2011	2:45:43 PM	Bypass valve closed
2/18/2011	2:45:43 PM	H2 valve opened
2/18/2011	2:45:43 PM	Bubbler valve opened
2/18/2011	2:45:43 PM	Helium MFC set to  0.000000
2/18/2011	2:45:43 PM	H2 MFC set to  400.000000
2/18/2011	2:45:43 PM	BCl3 MFC set to  0.000000
2/18/2011	2:45:43 PM	PHl3 MFC set to  0.000000
2/18/2011	2:45:43 PM	SiCl4 MFC set to  0.000000
2/18/2011	2:45:43 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	2:45:43 PM	Tube furnace set to 1001
2/18/2011	2:55:43 PM	Helium valve closed
2/18/2011	2:55:43 PM	BCl3 valve closed
2/18/2011	2:55:43 PM	PH3 valve closed
2/18/2011	2:55:43 PM	Main Vac valve closed
2/18/2011	2:55:43 PM	Bypass valve closed
2/18/2011	2:55:43 PM	H2 valve opened
2/18/2011	2:55:43 PM	SiCl4 pre valve opened
2/18/2011	2:55:43 PM	SiCl4 post valve opened
2/18/2011	2:55:43 PM	Bubbler valve opened
2/18/2011	2:55:43 PM	Helium MFC set to  0.000000
2/18/2011	2:55:43 PM	H2 MFC set to  450.000000
2/18/2011	2:55:43 PM	BCl3 MFC set to  0.000000
2/18/2011	2:55:43 PM	PHl3 MFC set to  0.000000
2/18/2011	2:55:43 PM	SiCl4 MFC set to  45.000000
2/18/2011	2:55:43 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	2:55:44 PM	Tube furnace set to 1000
2/18/2011	2:56:14 PM	H2 valve closed
2/18/2011	2:56:14 PM	BCl3 valve closed
2/18/2011	2:56:14 PM	PH3 valve closed
2/18/2011	2:56:14 PM	SiCl4 pre valve closed
2/18/2011	2:56:14 PM	SiCl4 post valve closed
2/18/2011	2:56:14 PM	Main Vac valve closed
2/18/2011	2:56:14 PM	Bypass valve closed
2/18/2011	2:56:14 PM	Helium valve opened
2/18/2011	2:56:14 PM	Bubbler valve opened
2/18/2011	2:56:14 PM	Helium MFC set to  400.000000
2/18/2011	2:56:14 PM	H2 MFC set to  0.000000
2/18/2011	2:56:14 PM	BCl3 MFC set to  0.000000
2/18/2011	2:56:14 PM	PHl3 MFC set to  0.000000
2/18/2011	2:56:14 PM	SiCl4 MFC set to  0.000000
2/18/2011	2:56:14 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	2:56:14 PM	Tube furnace set to 0
2/18/2011	3:21:14 PM	Helium valve closed
2/18/2011	3:21:14 PM	H2 valve closed
2/18/2011	3:21:14 PM	BCl3 valve closed
2/18/2011	3:21:14 PM	PH3 valve closed
2/18/2011	3:21:14 PM	SiCl4 pre valve closed
2/18/2011	3:21:14 PM	SiCl4 post valve closed
2/18/2011	3:21:14 PM	Main Vac valve closed
2/18/2011	3:21:14 PM	Bypass valve closed
2/18/2011	3:21:14 PM	Bubbler valve closed
2/18/2011	3:21:14 PM	Helium MFC set to  0.000000
2/18/2011	3:21:14 PM	H2 MFC set to  0.000000
2/18/2011	3:21:14 PM	BCl3 MFC set to  0.000000
2/18/2011	3:21:14 PM	PHl3 MFC set to  0.000000
2/18/2011	3:21:14 PM	SiCl4 MFC set to  0.000000
2/18/2011	3:21:14 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	3:21:14 PM	Tube furnace set to 0
2/18/2011	3:21:14 PM	Run finished at 3:21 PM
2/18/2011	3:31:59 PM	Recipe started at 3:31 PM
2/18/2011	3:31:59 PM	Helium valve closed
2/18/2011	3:31:59 PM	BCl3 valve closed
2/18/2011	3:31:59 PM	PH3 valve closed
2/18/2011	3:31:59 PM	SiCl4 pre valve closed
2/18/2011	3:31:59 PM	SiCl4 post valve closed
2/18/2011	3:31:59 PM	Main Vac valve closed
2/18/2011	3:31:59 PM	Bypass valve closed
2/18/2011	3:31:59 PM	Bubbler valve closed
2/18/2011	3:31:59 PM	H2 valve opened
2/18/2011	3:31:59 PM	Helium MFC set to  0.000000
2/18/2011	3:31:59 PM	H2 MFC set to  500.000000
2/18/2011	3:31:59 PM	BCl3 MFC set to  0.000000
2/18/2011	3:31:59 PM	PHl3 MFC set to  0.000000
2/18/2011	3:31:59 PM	SiCl4 MFC set to  0.000000
2/18/2011	3:31:59 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	3:31:59 PM	Tube furnace set to 200
2/18/2011	3:32:06 PM	Helium valve closed
2/18/2011	3:32:06 PM	BCl3 valve closed
2/18/2011	3:32:06 PM	PH3 valve closed
2/18/2011	3:32:06 PM	SiCl4 pre valve closed
2/18/2011	3:32:06 PM	SiCl4 post valve closed
2/18/2011	3:32:06 PM	Main Vac valve closed
2/18/2011	3:32:06 PM	Bypass valve closed
2/18/2011	3:32:06 PM	H2 valve opened
2/18/2011	3:32:06 PM	Bubbler valve opened
2/18/2011	3:32:06 PM	Helium MFC set to  0.000000
2/18/2011	3:32:06 PM	H2 MFC set to  400.000000
2/18/2011	3:32:06 PM	BCl3 MFC set to  0.000000
2/18/2011	3:32:06 PM	PHl3 MFC set to  0.000000
2/18/2011	3:32:06 PM	SiCl4 MFC set to  0.000000
2/18/2011	3:32:06 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	3:32:06 PM	Tube furnace set to 1001
2/18/2011	3:52:06 PM	Helium valve closed
2/18/2011	3:52:06 PM	BCl3 valve closed
2/18/2011	3:52:06 PM	PH3 valve closed
2/18/2011	3:52:06 PM	Main Vac valve closed
2/18/2011	3:52:06 PM	Bypass valve closed
2/18/2011	3:52:06 PM	H2 valve opened
2/18/2011	3:52:06 PM	SiCl4 pre valve opened
2/18/2011	3:52:06 PM	SiCl4 post valve opened
2/18/2011	3:52:06 PM	Bubbler valve opened
2/18/2011	3:52:06 PM	Helium MFC set to  0.000000
2/18/2011	3:52:06 PM	H2 MFC set to  450.000000
2/18/2011	3:52:06 PM	BCl3 MFC set to  0.000000
2/18/2011	3:52:06 PM	PHl3 MFC set to  0.000000
2/18/2011	3:52:06 PM	SiCl4 MFC set to  45.000000
2/18/2011	3:52:06 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	3:52:06 PM	Tube furnace set to 1000
2/18/2011	3:52:36 PM	H2 valve closed
2/18/2011	3:52:36 PM	BCl3 valve closed
2/18/2011	3:52:36 PM	PH3 valve closed
2/18/2011	3:52:36 PM	SiCl4 pre valve closed
2/18/2011	3:52:36 PM	SiCl4 post valve closed
2/18/2011	3:52:36 PM	Main Vac valve closed
2/18/2011	3:52:36 PM	Bypass valve closed
2/18/2011	3:52:36 PM	Helium valve opened
2/18/2011	3:52:36 PM	Bubbler valve opened
2/18/2011	3:52:36 PM	Helium MFC set to  400.000000
2/18/2011	3:52:36 PM	H2 MFC set to  0.000000
2/18/2011	3:52:36 PM	BCl3 MFC set to  0.000000
2/18/2011	3:52:36 PM	PHl3 MFC set to  0.000000
2/18/2011	3:52:36 PM	SiCl4 MFC set to  0.000000
2/18/2011	3:52:36 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	3:52:36 PM	Tube furnace set to 0
2/18/2011	4:17:36 PM	Helium valve closed
2/18/2011	4:17:36 PM	H2 valve closed
2/18/2011	4:17:36 PM	BCl3 valve closed
2/18/2011	4:17:36 PM	PH3 valve closed
2/18/2011	4:17:36 PM	SiCl4 pre valve closed
2/18/2011	4:17:36 PM	SiCl4 post valve closed
2/18/2011	4:17:36 PM	Main Vac valve closed
2/18/2011	4:17:36 PM	Bypass valve closed
2/18/2011	4:17:36 PM	Bubbler valve closed
2/18/2011	4:17:36 PM	Helium MFC set to  0.000000
2/18/2011	4:17:36 PM	H2 MFC set to  0.000000
2/18/2011	4:17:36 PM	BCl3 MFC set to  0.000000
2/18/2011	4:17:36 PM	PHl3 MFC set to  0.000000
2/18/2011	4:17:36 PM	SiCl4 MFC set to  0.000000
2/18/2011	4:17:36 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:17:36 PM	Tube furnace set to 0
2/18/2011	4:17:37 PM	Run finished at 4:17 PM
2/18/2011	4:20:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2011	4:20:50 PM	Recipe started at 4:20 PM
2/18/2011	4:20:50 PM	Helium valve closed
2/18/2011	4:20:50 PM	H2 valve closed
2/18/2011	4:20:50 PM	BCl3 valve closed
2/18/2011	4:20:50 PM	PH3 valve closed
2/18/2011	4:20:50 PM	SiCl4 pre valve closed
2/18/2011	4:20:50 PM	SiCl4 post valve closed
2/18/2011	4:20:50 PM	Main Vac valve closed
2/18/2011	4:20:50 PM	Bubbler valve closed
2/18/2011	4:20:50 PM	Bypass valve opened
2/18/2011	4:20:50 PM	Helium MFC set to  0.000000
2/18/2011	4:20:50 PM	H2 MFC set to  0.000000
2/18/2011	4:20:50 PM	BCl3 MFC set to  0.000000
2/18/2011	4:20:50 PM	PHl3 MFC set to  0.000000
2/18/2011	4:20:50 PM	SiCl4 MFC set to  0.000000
2/18/2011	4:20:50 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:20:50 PM	Tube furnace set to 0
2/18/2011	4:21:12 PM	Helium valve closed
2/18/2011	4:21:12 PM	H2 valve closed
2/18/2011	4:21:12 PM	BCl3 valve closed
2/18/2011	4:21:12 PM	PH3 valve closed
2/18/2011	4:21:12 PM	SiCl4 pre valve closed
2/18/2011	4:21:12 PM	SiCl4 post valve closed
2/18/2011	4:21:12 PM	Bubbler valve closed
2/18/2011	4:21:12 PM	Main Vac valve opened
2/18/2011	4:21:12 PM	Bypass valve opened
2/18/2011	4:21:12 PM	Helium MFC set to  0.000000
2/18/2011	4:21:12 PM	H2 MFC set to  0.000000
2/18/2011	4:21:12 PM	BCl3 MFC set to  0.000000
2/18/2011	4:21:12 PM	PHl3 MFC set to  0.000000
2/18/2011	4:21:12 PM	SiCl4 MFC set to  0.000000
2/18/2011	4:21:12 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:21:12 PM	Tube furnace set to 0
2/18/2011	4:21:12 PM	Run finished at 4:21 PM
2/18/2011	4:21:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2011	4:22:07 PM	Helium MFC set to  100.000000
2/18/2011	4:22:08 PM	Helium valve opened
2/18/2011	4:22:25 PM	Helium valve closed
2/18/2011	4:22:28 PM	Helium MFC set to  0.000000
2/18/2011	4:32:18 PM	Recipe started at 4:32 PM
2/18/2011	4:32:18 PM	Helium valve closed
2/18/2011	4:32:18 PM	BCl3 valve closed
2/18/2011	4:32:18 PM	PH3 valve closed
2/18/2011	4:32:18 PM	SiCl4 pre valve closed
2/18/2011	4:32:18 PM	SiCl4 post valve closed
2/18/2011	4:32:18 PM	Main Vac valve closed
2/18/2011	4:32:18 PM	Bypass valve closed
2/18/2011	4:32:18 PM	Bubbler valve closed
2/18/2011	4:32:18 PM	H2 valve opened
2/18/2011	4:32:18 PM	Helium MFC set to  0.000000
2/18/2011	4:32:18 PM	H2 MFC set to  500.000000
2/18/2011	4:32:18 PM	BCl3 MFC set to  0.000000
2/18/2011	4:32:18 PM	PHl3 MFC set to  0.000000
2/18/2011	4:32:18 PM	SiCl4 MFC set to  0.000000
2/18/2011	4:32:18 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:32:18 PM	Tube furnace set to 200
2/18/2011	4:33:31 PM	Helium valve closed
2/18/2011	4:33:31 PM	BCl3 valve closed
2/18/2011	4:33:31 PM	PH3 valve closed
2/18/2011	4:33:31 PM	SiCl4 pre valve closed
2/18/2011	4:33:31 PM	SiCl4 post valve closed
2/18/2011	4:33:31 PM	Main Vac valve closed
2/18/2011	4:33:31 PM	Bypass valve closed
2/18/2011	4:33:31 PM	H2 valve opened
2/18/2011	4:33:31 PM	Bubbler valve opened
2/18/2011	4:33:31 PM	Helium MFC set to  0.000000
2/18/2011	4:33:31 PM	H2 MFC set to  400.000000
2/18/2011	4:33:31 PM	BCl3 MFC set to  0.000000
2/18/2011	4:33:31 PM	PHl3 MFC set to  0.000000
2/18/2011	4:33:31 PM	SiCl4 MFC set to  0.000000
2/18/2011	4:33:31 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:33:31 PM	Tube furnace set to 1001
2/18/2011	4:53:31 PM	Helium valve closed
2/18/2011	4:53:31 PM	BCl3 valve closed
2/18/2011	4:53:31 PM	PH3 valve closed
2/18/2011	4:53:31 PM	Main Vac valve closed
2/18/2011	4:53:31 PM	Bypass valve closed
2/18/2011	4:53:31 PM	H2 valve opened
2/18/2011	4:53:31 PM	SiCl4 pre valve opened
2/18/2011	4:53:31 PM	SiCl4 post valve opened
2/18/2011	4:53:31 PM	Bubbler valve opened
2/18/2011	4:53:31 PM	Helium MFC set to  0.000000
2/18/2011	4:53:31 PM	H2 MFC set to  450.000000
2/18/2011	4:53:31 PM	BCl3 MFC set to  0.000000
2/18/2011	4:53:31 PM	PHl3 MFC set to  0.000000
2/18/2011	4:53:31 PM	SiCl4 MFC set to  45.000000
2/18/2011	4:53:31 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:53:31 PM	Tube furnace set to 1000
2/18/2011	4:58:31 PM	H2 valve closed
2/18/2011	4:58:31 PM	BCl3 valve closed
2/18/2011	4:58:31 PM	PH3 valve closed
2/18/2011	4:58:31 PM	SiCl4 pre valve closed
2/18/2011	4:58:31 PM	SiCl4 post valve closed
2/18/2011	4:58:31 PM	Main Vac valve closed
2/18/2011	4:58:31 PM	Bypass valve closed
2/18/2011	4:58:31 PM	Helium valve opened
2/18/2011	4:58:31 PM	Bubbler valve opened
2/18/2011	4:58:31 PM	Helium MFC set to  400.000000
2/18/2011	4:58:31 PM	H2 MFC set to  0.000000
2/18/2011	4:58:31 PM	BCl3 MFC set to  0.000000
2/18/2011	4:58:31 PM	PHl3 MFC set to  0.000000
2/18/2011	4:58:31 PM	SiCl4 MFC set to  0.000000
2/18/2011	4:58:31 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	4:58:32 PM	Tube furnace set to 0
2/18/2011	5:23:31 PM	Helium valve closed
2/18/2011	5:23:31 PM	H2 valve closed
2/18/2011	5:23:31 PM	BCl3 valve closed
2/18/2011	5:23:31 PM	PH3 valve closed
2/18/2011	5:23:31 PM	SiCl4 pre valve closed
2/18/2011	5:23:31 PM	SiCl4 post valve closed
2/18/2011	5:23:31 PM	Main Vac valve closed
2/18/2011	5:23:31 PM	Bypass valve closed
2/18/2011	5:23:31 PM	Bubbler valve closed
2/18/2011	5:23:32 PM	Helium MFC set to  0.000000
2/18/2011	5:23:32 PM	H2 MFC set to  0.000000
2/18/2011	5:23:32 PM	BCl3 MFC set to  0.000000
2/18/2011	5:23:32 PM	PHl3 MFC set to  0.000000
2/18/2011	5:23:32 PM	SiCl4 MFC set to  0.000000
2/18/2011	5:23:32 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	5:23:32 PM	Tube furnace set to 0
2/18/2011	5:23:32 PM	Run finished at 5:23 PM
2/18/2011	5:54:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	5:54:58 PM	Recipe started at 5:54 PM
2/18/2011	5:54:58 PM	H2 valve closed
2/18/2011	5:54:58 PM	BCl3 valve closed
2/18/2011	5:54:58 PM	PH3 valve closed
2/18/2011	5:54:58 PM	SiCl4 pre valve closed
2/18/2011	5:54:58 PM	SiCl4 post valve closed
2/18/2011	5:54:58 PM	Main Vac valve closed
2/18/2011	5:54:58 PM	Bypass valve closed
2/18/2011	5:54:58 PM	Bubbler valve closed
2/18/2011	5:54:58 PM	Helium valve opened
2/18/2011	5:54:58 PM	Helium MFC set to  500.000000
2/18/2011	5:54:58 PM	H2 MFC set to  0.000000
2/18/2011	5:54:58 PM	BCl3 MFC set to  0.000000
2/18/2011	5:54:58 PM	PHl3 MFC set to  0.000000
2/18/2011	5:54:58 PM	SiCl4 MFC set to  0.000000
2/18/2011	5:54:58 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	5:54:58 PM	Tube furnace set to 0
2/18/2011	5:54:59 PM	Helium valve closed
2/18/2011	5:54:59 PM	H2 valve closed
2/18/2011	5:54:59 PM	BCl3 valve closed
2/18/2011	5:54:59 PM	PH3 valve closed
2/18/2011	5:54:59 PM	SiCl4 pre valve closed
2/18/2011	5:54:59 PM	SiCl4 post valve closed
2/18/2011	5:54:59 PM	Main Vac valve closed
2/18/2011	5:54:59 PM	Bypass valve closed
2/18/2011	5:54:59 PM	Bubbler valve closed
2/18/2011	5:54:59 PM	Helium MFC set to  0.000000
2/18/2011	5:54:59 PM	H2 MFC set to  0.000000
2/18/2011	5:54:59 PM	BCl3 MFC set to  0.000000
2/18/2011	5:54:59 PM	PHl3 MFC set to  0.000000
2/18/2011	5:54:59 PM	SiCl4 MFC set to  0.000000
2/18/2011	5:54:59 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	5:55:00 PM	Tube furnace set to 0
2/18/2011	5:55:00 PM	Run finished at 5:55 PM
2/18/2011	5:55:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/18/2011	5:55:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/18/2011	5:55:47 PM	Recipe started at 5:55 PM
2/18/2011	5:55:47 PM	Helium valve closed
2/18/2011	5:55:47 PM	H2 valve closed
2/18/2011	5:55:47 PM	BCl3 valve closed
2/18/2011	5:55:47 PM	PH3 valve closed
2/18/2011	5:55:47 PM	SiCl4 pre valve closed
2/18/2011	5:55:47 PM	SiCl4 post valve closed
2/18/2011	5:55:47 PM	Main Vac valve closed
2/18/2011	5:55:47 PM	Bubbler valve closed
2/18/2011	5:55:47 PM	Bypass valve opened
2/18/2011	5:55:47 PM	Helium MFC set to  0.000000
2/18/2011	5:55:47 PM	H2 MFC set to  0.000000
2/18/2011	5:55:47 PM	BCl3 MFC set to  0.000000
2/18/2011	5:55:47 PM	PHl3 MFC set to  0.000000
2/18/2011	5:55:47 PM	SiCl4 MFC set to  0.000000
2/18/2011	5:55:47 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	5:55:47 PM	Tube furnace set to 0
2/18/2011	5:56:10 PM	Helium valve closed
2/18/2011	5:56:10 PM	H2 valve closed
2/18/2011	5:56:10 PM	BCl3 valve closed
2/18/2011	5:56:10 PM	PH3 valve closed
2/18/2011	5:56:10 PM	SiCl4 pre valve closed
2/18/2011	5:56:10 PM	SiCl4 post valve closed
2/18/2011	5:56:10 PM	Bubbler valve closed
2/18/2011	5:56:10 PM	Main Vac valve opened
2/18/2011	5:56:10 PM	Bypass valve opened
2/18/2011	5:56:10 PM	Helium MFC set to  0.000000
2/18/2011	5:56:10 PM	H2 MFC set to  0.000000
2/18/2011	5:56:10 PM	BCl3 MFC set to  0.000000
2/18/2011	5:56:10 PM	PHl3 MFC set to  0.000000
2/18/2011	5:56:10 PM	SiCl4 MFC set to  0.000000
2/18/2011	5:56:10 PM	Bypass solenoid MFC set to  0.000000
2/18/2011	5:56:10 PM	Tube furnace set to 0
2/18/2011	5:56:10 PM	Run finished at 5:56 PM
2/18/2011	5:56:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
